10 years of teaching and research, 5 years of clean room operation
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10 years of teaching and research, 5 years of clean room operation report 1991-2001 by

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Published by Shaker in Aachen .
Written in English


  • Technische Universität Braunschweig. -- Institut für Mikrotechnik.,
  • Microelectronics -- Research.,
  • Clean rooms.

Book details:

Edition Notes

Includes bibliographical references (p. 81-95).

StatementS. Büttgenbach (editor).
SeriesBerichte aus der Mikro- und Feinwerktechnik -- Bd. 7
ContributionsBüttgenbach, S. 1945-
LC ClassificationsTK7874 .A123 2002
The Physical Object
Pagination97 p. :
Number of Pages97
ID Numbers
Open LibraryOL16276445M
ISBN 103832202838
LC Control Number2004464711

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